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Solutions Manual

SILICON VLSI TECHNOLOGY Fundamentals, Practice and Models Solutions Manual for Instructors

James D. Plummer Michael D. Deal Peter B. Griffin

SILICON VLSI TECHNOLOGY Fundamentals, Practice and Modeling By Plummer, Deal and Griffin

1

¨Ï 2000 by Prentice Hall Upper Saddle River, NJ.

Solutions Manual

Chapter 1 Problems
1.1. Plot the NRTS roadmap data from Table 1.1 (feature size vs. time) on an expanded scale version of Fig. 1.2. Do all the points lie exactly on a straight line? If not what reasons can you suggest for any deviations you observe? Answer:

250 200 150 100 50 0 1997

2002 Year

2007

2012

Interestingly, the actual data seems to consist of two slopes, with a steeper slope for the first 2 years of the roadmap. Apparently the writers of the roadmap are more confident of the industry`s ability to make progress in the short term as opposed to the long term. 1.2. Assuming dopant atoms are uniformly distributed in a silicon crystal, ¡¦(»ý·«)